POLYHEDRAL OLIGOMERIC SILSESQUIOXANE COMPOUND CONTAINING MERCAPTO POLYFUNCTIONAL GROUP, ITS COMPOSITION, AND SOFT TEMPLATE FOR IMPRINTING

摘要

Provided are a polyhedral oligomeric silsesquioxane compound containing mercapto polyfunctional group shown as general formula (1), its composition used for preparing the soft template for imprinting and the imprinting process, wherein R1 is -CH2-CH2-CH2-SH, and m represents the integer of 3 to 12; R2 is unsubstituted or substituted alkyl group, unsubstituted or substituted alkoxy, unsubstituted or substituted ester group, and unsubstituted or substituted aryl group respectively, and the said substituent group is halogen; n represents the integer of 1 to 12. The composition is a high hydrophobic photoresist. When the composition is applied to prepare nanoimprinting template, a high precision structure can be achieved and the recycling rate of the template may be improved.