发明名称 CALIBRATION OF A PROBE IN PTYCHOGRAPHY
摘要 <p>A method of providing image data for constructing an image of a region of a target object comprises providing a reference diffraction pattern of a reference target object; determining an initial guess for a probe function based upon the reference diffraction pattern; and determining, by an iterative process based on the initial guess for the probe function and an initial guess for an object function, image data for a target object responsive to an intensity of radiation detected by at least one detector.</p>
申请公布号 EP2585853(A2) 申请公布日期 2013.05.01
申请号 EP20110738777 申请日期 2011.06.27
申请人 PHASE FOCUS LIMITED 发明人 MAIDEN, ANDREW
分类号 G01T1/29 主分类号 G01T1/29
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