| 摘要 |
<p>According to the invention an electrochemical deposition or polishing clamber including:
a support for a substrate, the support having an in-use position;
a housing having an interior surface and a fluid outlet pathway for removing an electrolyte from the chamber, wherein the fluid outlet pathway includes one or more slots which extend into the housing from at least one slotted opening formed in the interior surface;
a seal for sealing the housing to a peripheral portion of a surface of a substrate position on the support in its in-use position; and
a tilting mechanism for tilting the chamber in order to assist in removing electrolyte from the housing through the fluid outlet pathway.</p> |
