发明名称 |
ARC DEPOSITION SOURCE HAVING A DEFINED ELECTRIC FIELD |
摘要 |
The invention relates to an arc deposition device, comprising a cathode, an anode, as well as a voltage source for putting the anode at positive potential relative to the cathode. The device also comprises magnetic elements, which cause a magnetic field over the cathode surface, wherein the anode is arranged in the vicinity of the cathode in such a way that the magnetic field lines exiting from the cathode surface hit the anode. |
申请公布号 |
EP2585622(A1) |
申请公布日期 |
2013.05.01 |
申请号 |
EP20110727116 |
申请日期 |
2011.06.03 |
申请人 |
OERLIKON TRADING AG, TRUEBBACH |
发明人 |
KRASSNITZER, SIEGFRIED;HAGMANN, JUERG |
分类号 |
C23C14/02;C23C14/00;C23C14/32;C23C14/35;C23C14/58 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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