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发明名称
SELF-CLEANING FILM THICKNESS MEASURING APPARATUS, AND METHOD OF CLEANING FILM THICKNESS MEASURING APPARATUS
摘要
申请公布号
EP2585800(A1)
申请公布日期
2013.05.01
申请号
EP20110798990
申请日期
2011.06.24
申请人
TANGIDYNE CORPORATION
发明人
GRIMSHAW, SCOTT, F.
分类号
G01H13/00
主分类号
G01H13/00
代理机构
代理人
主权项
地址
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