| 摘要 |
A Process for Making a Patterned Metal Oxide StructureAbstractThere is provided a process for making a patterned metal oxide structure comprising the step of heating an imprint structure comprising a polymerized organometallic compound to remove organic material and thereby form the patterned metal oxide structure, wherein the imprintstructure is formed by polymerizing a resist mixture comprising at least one olefinic polymerizable compound and a polymerizable organometallic compound having, e.g., at least one carboxylate of Fo/mula 1:[err]Formula 1whereinn is 1-12; andeach R is independently selected from the group consisting of hydrogen, alkyl, alkenyl, alkynyl, cycloalkyl, cycloakenyl, aryl, and aralkyl.(Fig. 1) |
