| 摘要 |
DISCLOSED IS A COMPOSITION FOR FORMING A TOP ANTIREFLECTIVE FILM, WHICH COMPRISES AT LEAST ONE FLUORINE-CONTAINING COMPOUND AND A QUATERNARY AMMONIUM COMPOUND REPRESENTED BY THE FORMULA (1) [WHEREIN AT LEAST ONE OF RT, R2, R3,AND R4 REPRESENTS A HYDROXYL GROUP OR AN ALKANOL GROUP, AND THE OTHERS INDEPENDENTLY REPRESENT A HYDROGEN OR AN ALKYL GROUP HAVING 1 TO 10 CARBON ATOMS; AND X- REPRESENTS A HYDROXYL GROUP, A HALIDE ION OR A SULFATE ION], AND OPTIONALLY A WATER-SOLUBLE POLYMER, AN ACID, A SURFACTANT AND AN AQUEOUS SOLVENT. THE COMPOSITION FOR FORMING A TOP ANTIREFLECTIVE FILM CAN EXHIBIT THE SAME LEVELS OF FUNCTIONS AS THOSE OF CONVENTIONAL TOP ANTIREFLECTIVE FILM-FORMING COMPOSITIONS WHEN APPLIED IN A SMALLER AMOUNT. [GENERAL FORMULA (1)] |
