发明名称 |
Methods for preventing corrosion of plasma-exposed yttria-coated constituents |
摘要 |
In accordance with one embodiment of the present disclosure, a method for preventing corrosion of a plasma-exposed yttria-coated constituent from ambient acidic hydrolysis wherein the plasma-exposed yttria-coated constituent includes a hydrolysable acid precursor is disclosed. The method may include: removing the plasma-exposed yttria-coated constituent from a semiconductor processing assembly; binding the plasma-exposed yttria-coated constituent with flexible moisture wicking material; hydrolyzing the hydrolysable acid precursor with an overwhelming aqueous admixture to form a vitiated acidic compound, wherein the flexible moisture wicking material pulls the vitiated acidic compound away from the plasma-exposed yttria-coated constituent with capillary action; dehydrating the plasma-exposed yttria-coated constituent with additional flexible moisture wicking material to pull a latent amount of the vitiated acidic compound away from the plasma-exposed yttria-coated constituent; and isolating the plasma-exposed yttria-coated constituent from ambient moisture in a moisture obstructing enclosure. |
申请公布号 |
US8430970(B2) |
申请公布日期 |
2013.04.30 |
申请号 |
US20100852673 |
申请日期 |
2010.08.09 |
申请人 |
SWAMI GANAPATHY;LOEWENHARDT PETER;KIM YUNSANG;LAM RESEARCH CORPORATION |
发明人 |
SWAMI GANAPATHY;LOEWENHARDT PETER;KIM YUNSANG |
分类号 |
B08B7/00;B08B3/00;B08B7/04 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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