发明名称 |
Method for forming a compound semi-conductor thin-film |
摘要 |
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material.
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申请公布号 |
US8431430(B2) |
申请公布日期 |
2013.04.30 |
申请号 |
US201213478851 |
申请日期 |
2012.05.23 |
申请人 |
BRUCE ALLAN JAMES;FROLOV SERGEY;CYRUS MICHAEL;SUNLIGHT PHOTONICS INC. |
发明人 |
BRUCE ALLAN JAMES;FROLOV SERGEY;CYRUS MICHAEL |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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