| 摘要 |
PURPOSE: An interference thickness measuring device is provided to calculate the thickness of a target film even though a position of the target film is dislocated from a reference position. CONSTITUTION: An interference thickness measuring device comprises a light transmission unit, a light receiving unit, a scanning unit(7), a spectral data acquisition unit(15), a power spectrum calculation unit(17), a layer thickness calculation unit(19), and data extraction unit(21). The light transmission unit irradiates lights of a light source(1) to a target film. The light receiving unit receives the reflected light or transmission light from the target film. A focus position projecting unit projects a common focal point which is a focal position of the lights incident to the light receiving unit within a predetermined range. The spectral data acquisition unit acquires the spectral data of the lights received by the light receiving unit. The power spectrum calculation unit calculates a power spectrum based on the spectral data. The layer thickness calculation unit calculates the thickness of the target film based on the power spectral data. [Reference numerals] (1) Light source; (11) Spectroscope; (13) Operation unit; (15) Spectral data acquisition unit; (17) Power spectrum calculation unit; (19) Layer thickness calculation unit; (21) Data extraction unit;
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