发明名称 |
Cool-down system and method for a vapor deposition system |
摘要 |
A system for vapor deposition of a thin film layer on photovoltaic (PV) module substrates includes a system for cool-down of the vacuum chamber through which substrates are conveyed in a vapor deposition process. The cool-down system is configured with the vacuum chamber to recirculate a cooling gas through the vacuum chamber and through an external heat exchanger in a closed cool-down loop. An associated method for forced cool-down of the vacuum chamber is also provided.
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申请公布号 |
US8430963(B2) |
申请公布日期 |
2013.04.30 |
申请号 |
US20100683807 |
申请日期 |
2010.01.07 |
申请人 |
PAULMAN JASON SCOTT;BLACK RUSSELL WELDON;PAVOL MARK JEFFREY;PRIMESTAR SOLAR, INC. |
发明人 |
PAULMAN JASON SCOTT;BLACK RUSSELL WELDON;PAVOL MARK JEFFREY |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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