发明名称 |
WATER-REACTIVE AL-BASED COMPOSITE MATERIAL, WATER-REACTIVE AL-BASED THERMALLY SPRAYED FILM, PROCESS FOR PRODUCTION OF SUCH AL-BASED THERMALLY SPRAYED FILM, AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER |
摘要 |
<p>WATER-REACTIVE AL-BASED COMPOSITE MATERIAL, WATER-REACTIVE AL-BASED THERMALLY SPRAYED FILM, PROCESS FOR PRODUCTION OF SUCH AL-BASED THERMALLY SPRAYED FILM, AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBERHerein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.Fig. 2</p> |
申请公布号 |
SG188239(A1) |
申请公布日期 |
2013.04.30 |
申请号 |
SG20130012141 |
申请日期 |
2011.08.12 |
申请人 |
ULVAC, INC. |
发明人 |
KADOWAKI, YUTAKA;SAITOU, TOMOKO;MUSHIAKE, KATSUHIKO |
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