发明名称 Process for measuring an adhesion energy, and associated substrates
摘要 The invention relates to a structure and a process for measuring an energy of adhesion between two substrates bonded in a transverse direction. The method involves providing for at least one of the two substrates to have a plurality of elementary test cells within a test layer each being capable of locally applying, in the transverse direction, a preset mechanical stress (sigma), dependent on the temperature (T), to a bond interface between the substrates in a direction tending to separate them, applying a test temperature to the substrates and identifying debonded regions of the bond interface so that the local adhesion energy at the test temperature in the regions may be deduced therefrom, the local adhesion energy in a region of the bond interface being deduced from the stress applied by the test cells that caused debonding in the region.
申请公布号 US8429960(B2) 申请公布日期 2013.04.30
申请号 US20100910023 申请日期 2010.10.22
申请人 LANDRU DIDIER;SOITEC 发明人 LANDRU DIDIER
分类号 G01N19/04;G01L1/00;G01N3/08 主分类号 G01N19/04
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