| 摘要 |
20Method for Determining the Position of an Axis of RotationAbstractThis invention relates to a method for determining an X-Y position, in an X-Y coordinate system, of an axis of rotation (12), which is perpendicular to the X-Y coordinate system, of a substrate holding means (14) that can rotate around the axis of rotation (12) for holding a substrate (3) with the following steps:- Determining a first X-Y reference position RP of a reference labeling(10) that is provided on the substrate holding means (14) or on thesubstrate (3),Rotating the substrate holding means (14) by a defined angle of rotation R, in particular 180 degrees, around the axis of rotation (12), Determining a second X-Y reference position RP' of the reference labeling (10) that is changed by the rotation, andCalculating the position of the axis of rotation (12) in the substrate plane.Figure 3b. |
