| 摘要 |
PURPOSE: An inline type thermal processing device is provided to easily separate only the defective furnace by sealing a space between adjacent furnaces with a sealing member. CONSTITUTION: A loading unit(100) includes a furnace(110). A plurality of rollers(125) transfer a substrate to a furnace(210) of an ambient temperature raising unit(200). The temperature raising unit heats the substrate and transfers the substrate to a processing unit(300). A transfer unit(400) receives the substrate from the processing unit and vertically transfers the substrate. A cooling unit(500) cools the substrate transferred from the transfer unit with a preset temperature and transfers the substrate to an unloading unit(600). |
