METHOD OF GENERATING A RECIPE FOR A MANUFACTURING TOOL AND SYSTEM THEREOF

摘要

METHOD OF GENERATING A RECIPE FOR A MANUFACTURING TOOL AND SYSTEM THEREOFAbstractA computer creates a recipe for a manufacturing tool based on design data. The computer obtains the design data, which includes basic elements and hierarchical levels corresponding to the basic elements. The computer selects one or more basic elements of interest and generates one or more sets of simple array cells corresponding to a level of interest. The computer uses the sets of simple array cells to identify periodical areas in level of-interest coordinates to enable automated recipe creation. The periodical areas are identified with respect to one or more basic elements.Figure 1