发明名称 |
Micromechanical pressure-sensor element and method for its production |
摘要 |
A very robust sensor element for an absolute-pressure measurement is described, which is suitable for high temperatures and able to be miniaturized to a large extent. The micromechanical pressure-sensor element includes a sensor diaphragm having a rear-side pressure connection and at least one dielectrically insulated piezo resistor for signal acquisition. Furthermore, the pressure-sensor element has a front-side reference volume, which is sealed by a cap structure spanning the sensor diaphragm. The cap structure is realized as thin-film structure. |
申请公布号 |
US8429977(B2) |
申请公布日期 |
2013.04.30 |
申请号 |
US201113035522 |
申请日期 |
2011.02.25 |
申请人 |
AHLES MARCUS;BENZEL HUBERT;ROBERT BOSCH GMBH |
发明人 |
AHLES MARCUS;BENZEL HUBERT |
分类号 |
G01L9/06;G01L7/00;H01C17/28 |
主分类号 |
G01L9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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