发明名称 |
VACUUM ROLL FOR ROLL TO ROLL SPUTTER |
摘要 |
PURPOSE: A vacuum roll for a roll to roll sputter is provided to prevent a cleaning problem in the inside by generating vacuum in a roll. CONSTITUTION: A vacuum roll for a roll to roll sputter comprises a roll flange(30), a sealing unit(40), a rotating tool(50), and a sealing unit(60). The sealing unit forms an air discharge path(45) in the roll flange to generate a vacuum state in the inside of a roll pipe(10). The rotating tool seals a through hole(34) by rotating the sealing unit and maintains the vacuum state in the roll pipe. The sealing unit fixes the rotating tool and seals an end of the roll flange.
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申请公布号 |
KR20130043334(A) |
申请公布日期 |
2013.04.30 |
申请号 |
KR20110107378 |
申请日期 |
2011.10.20 |
申请人 |
VTS CORPORATION |
发明人 |
JUNG, WON HO;NAM, SEUNG JAE;WOO, SHI GWAN;LEE, SEUNG HAK;SON, JAE IL |
分类号 |
C23C14/34;C23C14/56 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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