发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for preventing a semiconductor device is provided to improve the performance of the semiconductor device by securing an overlay with an adjacent wire or an adjacent pattern. CONSTITUTION: A wire composed of a plurality of line patterns(200) is formed. The line pattern is arranged in vertical and horizontal directions. A pad region connected to the wire with the minimum linewidth is formed. A contact is formed in the pad region. The pad region and the wire are formed in a core region.
申请公布号 KR20130042928(A) 申请公布日期 2013.04.29
申请号 KR20110107091 申请日期 2011.10.19
申请人 SK HYNIX INC. 发明人 JEONG, JOO HONG
分类号 H01L21/28 主分类号 H01L21/28
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