| 摘要 |
PURPOSE: A substrate fixing module, a substrate inspecting device including the same, and a substrate fixing method using the same are provided to maximally secure an inspection region by minimizing a substrate fixing region. CONSTITUTION: A block support body(220) faces one edge of an inspection substrate. A substrate fixing block(210) is arranged on the block support body. The substrate fixing block is combined with the block support block. A block combining unit(230) combines the substrate fixing block to the block support block. The block combining unit includes a fixing bolt, a fixing nut, and a tightening unit.
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