| 摘要 |
PURPOSE: An in-line heat treatment apparatus is provided to prevent a furnace from being contaminated due to an exhaust hole by forming the exhaust holes which discharge solvents evaporated from a substrate in the furnaces, respectively. CONSTITUTION: A plurality of furnaces(110,210,310,410,510,610) provide a space for thermally treating a substrate(50). A heater(213) is installed inside the furnace and heats the substrate. A transfer unit(400) is installed in the furnace and transfers the substrate to an adjacent furnace. A cooling unit(500) transfers the substrate to an unloading unit(600) after the substrate from the transfer unit is cooled with a preset temperature. The evaporated solvents and gas for thermally treating the substrate are discharged through the exhaust holes. |
