| 发明名称 |
SPUTTERING TARGET, TRANSPARENT CONDUCTIVE FILM AND TRANSPARENT ELECTRODE |
| 摘要 |
A sputtering target including indium, tin, zinc and oxygen, and including a hexagonal layered compound, a spinel structure compound and a bixbyite structure compound.
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| 申请公布号 |
US2013101807(A1) |
申请公布日期 |
2013.04.25 |
| 申请号 |
US201213712024 |
申请日期 |
2012.12.12 |
| 申请人 |
IDEMITSU KOSAN CO., LTD.;IDEMITSU KOSAN CO., LTD. |
发明人 |
YANO KOKI;INOUE KAZUYOSHI;TANAKA NOBUO |
| 分类号 |
C23C14/08 |
主分类号 |
C23C14/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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