| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic multilayer substrate in which, even if base material layers having different thickness are provided, a substrate warp suppression requirement can be satisfied sufficiently, and a manufacturing method thereof. <P>SOLUTION: A ceramic multilayer substrate comprises base material layers 12a-12j and 16a-16e which are obtained by sintering a ceramic material and the thickness of which are different from each other, and restriction layers 14a-14j and 18a-18e which are obtained by fixing non-sintered inorganic material powder via a fused and then solidified glass material and the thickness of which are different from each other. A plurality of laminate elements 11x and 11y each comprise one base material layer and one restriction layer laminated to each other are laminated to each other. The thickness of the base material layer 12a and the restriction layer 14a in the laminate element 11x including the thinnest base material layer among the laminate elements are defined as T<SB POS="POST">0</SB>and D<SB POS="POST">0</SB>respectively, the thickness of the base material layer 16a and the restriction layer 18a in the other laminate element 11y are defined as T<SB POS="POST">i</SB>and D<SB POS="POST">i</SB>respectively and smaller one between (T<SB POS="POST">0</SB>/D<SB POS="POST">0</SB>) and (T<SB POS="POST">i</SB>/D<SB POS="POST">i</SB>) is defined as K. In such a case, ¾(T<SB POS="POST">i</SB>/D<SB POS="POST">i</SB>)-(T<SB POS="POST">0</SB>/D<SB POS="POST">0</SB>)¾≤0.2×K is established. <P>COPYRIGHT: (C)2013,JPO&INPIT |
