| 摘要 |
<p>The device is provided with: a starting material gas supply set (5) obtained by gathering multiple starting material gas supplies; flow controller sets (1, 2, 3, 4) obtained by gathering multiple flow controllers; a flow controller system (100) obtained by gathering the multiple flow controller sets (1, 2, 3, 4); a simulated gas supply tube (101) for supplying the simulated gas to an evaluation device (500); a simulated gas exhaust tube (102) for exhausting the simulated gas without supplying same to the evaluation device; a switching valve system (200), which has switching valves (6, 7, 8, 9) that switch the simulated gas flow path to the simulated gas supply tube (101) or to the simulated gas exhaust tube (102) and which is obtained by gathering the multiple switching valves; and a control unit (300) for controlling the flow controller system (100) and the switching valve system (200).</p> |
