发明名称 |
PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE |
摘要 |
A piezoelectric device includes: a substrate; a first electrode which is layered over the substrate; a first piezoelectric film which is layered over the first electrode; a metal oxide film which is layered over the first piezoelectric film; a metal film which is layered over the metal oxide film; a second piezoelectric film which is layered over the metal film; and a second electrode which is layered over the second piezoelectric film.
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申请公布号 |
US2013099627(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US201213644178 |
申请日期 |
2012.10.03 |
申请人 |
FUJIFILM CORPORATION;FUJIFILM CORPORATION |
发明人 |
FUJII TAKAMICHI;HISHINUMA YOSHIKAZU |
分类号 |
H01L41/08;H01L41/04;H01L41/277 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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