发明名称 SUBSTRATE ALIGNMENT DEVICE
摘要 Disclosed is a substrate alignment device. A substrate alignment device according to the present invention includes a means for detecting whether an edge part of a substrate is loaded on and supported by support pins when the substrate is inputted into a main body and loaded on and supported by the support pins, and thus when the substrate is moved and aligned, the substrate or the support pins can be effectively prevented from being damaged.
申请公布号 WO2013058557(A2) 申请公布日期 2013.04.25
申请号 WO2012KR08504 申请日期 2012.10.18
申请人 TERASEMICON CORPORATION 发明人 LEE, EUN HO;OH, HONG LOK;KO, JIN YEONG
分类号 H01L21/68;G02F1/13;H01L21/677 主分类号 H01L21/68
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