发明名称 |
SUBSTRATE ALIGNMENT DEVICE |
摘要 |
Disclosed is a substrate alignment device. A substrate alignment device according to the present invention includes a means for detecting whether an edge part of a substrate is loaded on and supported by support pins when the substrate is inputted into a main body and loaded on and supported by the support pins, and thus when the substrate is moved and aligned, the substrate or the support pins can be effectively prevented from being damaged. |
申请公布号 |
WO2013058557(A2) |
申请公布日期 |
2013.04.25 |
申请号 |
WO2012KR08504 |
申请日期 |
2012.10.18 |
申请人 |
TERASEMICON CORPORATION |
发明人 |
LEE, EUN HO;OH, HONG LOK;KO, JIN YEONG |
分类号 |
H01L21/68;G02F1/13;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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