发明名称 |
METHOD FOR PRODUCING AN ORGANISED NETWORK OF SEMICONDUCTOR NANOWIRES, IN PARTICULAR MADE OF ZNO |
摘要 |
This method for producing an organised network of nanowires from ZnO comprises the following steps: obtaining a layer (1) of ZnO with Zn polarity on a substrate (5), by epitaxial growth at a low temperature, advantageously between 400°C and 650°C, and advantageously in the presence of dioxygen (O2); forming a mask (2) provided with openings (3) on this layer for the subsequent growth of the nanowires; epitaxial growth of ZnO nanowires (4). |
申请公布号 |
WO2013057456(A2) |
申请公布日期 |
2013.04.25 |
申请号 |
WO2012FR52404 |
申请日期 |
2012.10.19 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
THIERRY, ROBIN;FERRET, PIERRE;LAFOSSAS, MATTHIEU;PERILLAT-MERCEROZ, GUILLAUME |
分类号 |
H01L29/22;B82Y10/00;B82Y30/00;B82Y40/00;H01L21/02;H01L21/365;H01L21/469;H01L27/144;H01L29/06;H01L33/00;H01L33/18 |
主分类号 |
H01L29/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|