发明名称 METHOD FOR PRODUCING AN ORGANISED NETWORK OF SEMICONDUCTOR NANOWIRES, IN PARTICULAR MADE OF ZNO
摘要 This method for producing an organised network of nanowires from ZnO comprises the following steps: obtaining a layer (1) of ZnO with Zn polarity on a substrate (5), by epitaxial growth at a low temperature, advantageously between 400°C and 650°C, and advantageously in the presence of dioxygen (O2); forming a mask (2) provided with openings (3) on this layer for the subsequent growth of the nanowires; epitaxial growth of ZnO nanowires (4).
申请公布号 WO2013057456(A2) 申请公布日期 2013.04.25
申请号 WO2012FR52404 申请日期 2012.10.19
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 THIERRY, ROBIN;FERRET, PIERRE;LAFOSSAS, MATTHIEU;PERILLAT-MERCEROZ, GUILLAUME
分类号 H01L29/22;B82Y10/00;B82Y30/00;B82Y40/00;H01L21/02;H01L21/365;H01L21/469;H01L27/144;H01L29/06;H01L33/00;H01L33/18 主分类号 H01L29/22
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