摘要 |
<p>Provided is a capacitance sensor having high detection sensitivity, and capable of suppressing the temperature drift of an output signal. The capacitance sensor is characterized by having: an AC signal generator; a transmission electrode connected to the AC signal generator; a first receiving electrode; a second receiving electrode having the same temperature properties as the first receiving electrode; a first phase shift unit provided between the transmission electrode and the first receiving electrode; a second phase shift unit having the same temperature properties as the first phase shift unit, and provided between the transmission electrode and the second receiving electrode; a signal phase shift unit provided between the transmission electrode and the second receiving electrode; a first synthesis unit for synthesizing the signal phase-shifted by the first phase shift unit, and the signal received by the first receiving electrode; a second synthesis unit for synthesizing the signal phase-shifted by the second phase shift unit and the signal phase shift unit, and the signal received by the second receiving electrode; and a phase detection unit for detecting a phase difference between the first synthesized signal synthesized by the first synthesis unit, and the second synthesized signal synthesized by the second synthesis unit.</p> |