PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING SAME

摘要

A piezoelectric element (10) is configured by laminating a lower electrode (3) and a ferroelectric thin film (for example, a PZT thin film (4)) in this order on a substrate (1). The ferroelectric thin film is of perovskite type, and the crystal orientation thereof is a (100) preferred orientation. The lower electrode (3) is configured by laminating titanium oxide (a close adhesion layer (3a)) and platinum (an electrode layer (3b)) in this order from the substrate (1) side.