发明名称 |
COATER MAINTENANCE METHOD AND COATER |
摘要 |
<P>PROBLEM TO BE SOLVED: To reduce maintenance time for a coater. <P>SOLUTION: In maintenance of a slit coater device 40 which applies a coating resin formed by mixing a main agent 51e and a curing agent 52e, while the slit coater device 40 is unused (in a resin coating inactive state), the main agent 51e out of the main agent 51e and the curing agent 52e is filled in a slit coater head 42 to replace the contents in the head with the main agent 51e as one resin, and then a tip of the slit coater head 42 is soaked in the main agent 51e stored in a liquid tank 54. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013077671(A) |
申请公布日期 |
2013.04.25 |
申请号 |
JP20110216065 |
申请日期 |
2011.09.30 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
ARAKI MASAKI;OTAKE MITSUYUKI;SATO KAZUNARI |
分类号 |
H01L31/042;B05C5/02;B05C11/10 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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