发明名称 COATER MAINTENANCE METHOD AND COATER
摘要 <P>PROBLEM TO BE SOLVED: To reduce maintenance time for a coater. <P>SOLUTION: In maintenance of a slit coater device 40 which applies a coating resin formed by mixing a main agent 51e and a curing agent 52e, while the slit coater device 40 is unused (in a resin coating inactive state), the main agent 51e out of the main agent 51e and the curing agent 52e is filled in a slit coater head 42 to replace the contents in the head with the main agent 51e as one resin, and then a tip of the slit coater head 42 is soaked in the main agent 51e stored in a liquid tank 54. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013077671(A) 申请公布日期 2013.04.25
申请号 JP20110216065 申请日期 2011.09.30
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 ARAKI MASAKI;OTAKE MITSUYUKI;SATO KAZUNARI
分类号 H01L31/042;B05C5/02;B05C11/10 主分类号 H01L31/042
代理机构 代理人
主权项
地址
您可能感兴趣的专利