发明名称 PHOTOLITHOGRAPHY ON SHRINK FILM
摘要 Provided are methods of preparing a plurality of extrusions, comprising (a) shrinking a transparent first thermoplastic material comprising a plurality of non-transparent marks, (b) lithographically transferring the pattern of the shrunk non-transparent marks to a layer of photoresist deposited on a second thermoplastic material, and (c) shrinking the second thermoplastic material, thereby generating a plurality of extrusions on the shrunk second thermoplastic material.
申请公布号 US2013101795(A1) 申请公布日期 2013.04.25
申请号 US201213481653 申请日期 2012.05.25
申请人 KHINE MICHELLE;JAYADEV SHRESHTA;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 KHINE MICHELLE;JAYADEV SHRESHTA
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址