发明名称 SPUTTERING TARGET FOR MAGNETIC RECORDING FILM, AND PROCESS FOR PRODUCING SAME
摘要 Provided is a sputtering target containing SiO2 for a magnetic recording film, wherein a ratio of the peak intensity of cristobalites, which are crystallized SiO2, to the background intensity (cristobalite peak intensity/background intensity) in an X-ray diffraction is 1.40 or less. The present invention aims to obtain a sputtering target for a magnetic recording film capable of inhibiting the formation of cristobalites in the target which cause the generation of particles during sputtering, and shortening the burn-in time.
申请公布号 US2013098760(A1) 申请公布日期 2013.04.25
申请号 US201113808172 申请日期 2011.02.02
申请人 TAKAMI HIDEO;NARA ATSUSHI;OGINO SHIN-ICHI;JX NIPPON MINING & METALS CORPORATION 发明人 TAKAMI HIDEO;NARA ATSUSHI;OGINO SHIN-ICHI
分类号 C23C14/14 主分类号 C23C14/14
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