| 摘要 |
A displacement detecting device includes: a scale which has an optical lattice; a detecting unit which is disposed so as to be movable in a scanning direction relative to the scale, inclusive of at least a first detection portion, a second detection portion and a third detection portion, arranged in the scanning direction for detecting position information from the optical lattice; and a calculating portion configured to obtain a self-calibration curve on graduations of the scale by specifying positions of the detection portions and calculating measurement error based on the position information detected by the detecting unit, wherein: the detecting unit is provided so that a distance between the first detection portion and the second detection portion and a distance between the second detection portion and the third detection portion are different from each other and do not form an integral multiple.
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