| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vaporizer that can stabilize behavior of pressure in the vaporizer. <P>SOLUTION: A vaporizer includes: a chamber with an inlet and an outlet; a heater to heat the inside of the chamber; a partition structure 13 that is disposed in the chamber and divides a liquid material in the chamber into a plurality of sections; and fluid communication parts 20 that are disposed at lower parts of the partition structure 13 and permit a fluid communication between the individual sections divided by the partition structure 13. The partition structure has lattice-like, honeycomb-like, mesh-like, or pipe-like partitions. <P>COPYRIGHT: (C)2013,JPO&INPIT |
