发明名称 PHOTOCONDUCTIVE ELEMENT, LENS, TERAHERTZ EMISSION MICROSCOPE, AND METHOD FOR MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a terahertz emission microscope having improved detection accuracy of terahertz microwaves, to provide a photoconductive element and a lens to be used for the terahertz emission microscope, and to provide a method for manufacturing a device. <P>SOLUTION: A photoconductive element comprises a base material, electrodes, and a film material. The base material has an incident surface on which terahertz microwaves is made incident, in which the terahertz microwaves are generated by irradiating a device, i.e., an object to be observed with pulsed-laser beams that have been generated from a light source. The electrodes are formed on the base material, and detect the terahertz microwaves made incident on the incident surface of the base material. The film material is formed on the incident surface of the base material, transmits the terahertz microwaves, and reflects the pulsed-laser beams. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013076618(A) 申请公布日期 2013.04.25
申请号 JP20110216164 申请日期 2011.09.30
申请人 SONY CORP 发明人 KAMATA MASANAO
分类号 G01J1/02;G01N21/35;G01N21/3563;G01N21/3586;G01R31/26;G02B21/00;H01L21/66 主分类号 G01J1/02
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