PIEZOELECTRIC VIBRATOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To solve such a problem that in a piezoelectric vibrator having a leg, where a frequency can be adjusted by forming an adjusting film near the tip of the leg and removing part of the adjusting film, manufacturing steps in forming the adjusting film may fluctuate and the length of the formed adjusting film may fluctuate, thus the fluctuation in its length would significantly change a temperature characteristic curve.

SOLUTION: A method of manufacturing a piezoelectric vibrator includes the steps of: forming an excitation electrode for vibrating a leg on the leg; forming an adjusting film for adjusting a resonance frequency on the leg; removing at least part of the adjusting film to bring it into a predetermined shape; and adjusting the resonance frequency of the piezoelectric vibrator by removing part of the adjusting film.

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