ACCEPTOR HOLDER AND INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an acceptor holder and an inspection apparatus capable of obtaining more accurate inspection results by suppressing wrinkles and deflection of a film attached to an acceptor to be inspected.

SOLUTION: An acceptor holder 100 includes a storage case 102 capable of attaching/detaching the acceptor to be inspected in a thickness direction and a case cover 101 allowed to be fixed on the storage case 102. When the case cover 101 is fixed on the storage case 102 to which the acceptor to be inspected is attached, a storing part of the acceptor to be inspected is exposed to the outside through an aperture 121 formed on the case cover 101 and an aperture 122 formed on the storage case 102. The film of the acceptor to be inspected is pressed by a press part 123 projected from the periphery of an aperture edge of the aperture 122.

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