TUNING MOVABLE LAYER STIFFNESS WITH PROTRUSIONS IN THE MOVABLE LAYER
摘要
<p>This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity.</p>
申请公布号
WO2013059123(A1)
申请公布日期
2013.04.25
申请号
WO2012US60254
申请日期
2012.10.15
申请人
QUALCOMM MEMS TECHNOLOGIES, INC.
发明人
TUPELLY, CHANDRA SHEKAR REDDY;TAO, YI;DJORDJEV, KOSTADIN DIMITROV;KOGUT, LIOR;ARBUCKLE, BRIAN WILLIAM;GALLY, BRIAN JAMES;TUNG, MING-HAU