摘要 |
<P>PROBLEM TO BE SOLVED: To increase an effective area ratio of an X-ray detection panel without impairing reliability. <P>SOLUTION: An X-ray detection panel 24 comprises: a photoelectric conversion substrate 22; a phosphor film 14; a first bank 52; an adhesive layer 17; and a moisture-proof cover 15. The photoelectric conversion substrate 22 is composed of a glass substrate 41 and a photoelectric conversion element 42 arranged on the substrate 41. The phosphor film 14 is formed on the surface of the photoelectric conversion substrate 22. The first bank 52 surrounds pixel area where the photoelectric conversion element 42 is arranged and protrudes from the surface of the photoelectric conversion substrate 22. The adhesive layer 17 is provided between the first bank 52 and the pixel area. The moisture-proof cover 15 is adhered to the photoelectric conversion substrate 22 on the adhesive layer 17 and covers the photoelectric conversion element 42 and the phosphor film 14. <P>COPYRIGHT: (C)2013,JPO&INPIT |