发明名称 |
ARC EVAPORATION SOURCE HAVING FAST FILM-FORMING SPEED, COATING FILM MANUFACTURING METHOD AND FILM FORMATION APPARATUS USING THE ARC EVAPORATION SOURCE |
摘要 |
An arc evaporation source having fast film-forming speed includes: at least one circumference magnet surrounding the circumference of a target, wherein the magnetization direction of the magnet runs orthogonal to the target surface; a non-ring shaped first permanent magnet on the target's rear surface side has a polarity in the same direction as the circumference magnet, and is arranged so that its magnetization direction runs orthogonal to the target's surface; a non-ring shaped second permanent magnet arranged either on the rear surface side of the first permanent magnet or between the first permanent magnet and the target, so as to leave a gap from the first permanent magnet, has a polarity in the same direction as the circumference magnet, and is arranged so that its magnetization direction runs orthogonal to the surface of the target; and a magnetic body between the first permanent magnet and the second permanent magnet.
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申请公布号 |
US2013098881(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US201113805259 |
申请日期 |
2011.06.15 |
申请人 |
TANIFUJI SHINICHI;YAMAMOTO KENJI;NOMURA HOMARE;KUROKAWA YOSHINORI;GOTO NAOYUKI;KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) |
发明人 |
TANIFUJI SHINICHI;YAMAMOTO KENJI;NOMURA HOMARE;KUROKAWA YOSHINORI;GOTO NAOYUKI |
分类号 |
B23K9/00 |
主分类号 |
B23K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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