| 摘要 |
[Problem] To provide equipment for automatically detecting air in a mixed gas of organic gas and air and removing air from the mixed gas. [Solution] The saturation pressure value is calculated from the temperature of a mixed gas in a reservoir (1), the pressure threshold value representing addition of an excess value to this saturation pressure value is found, and, if the pressure value in the reservoir (1) is larger than this pressure threshold value, the fact that air has been admixed with the mixed gas is thereby detected. After this detection, a control section (5) condenses the organic gas in the mixed gas by introducing the mixed gas under elevated pressure to a pressure vessel (2) and thereby generates a diluted mixed gas. Next, the diluted mixed gas is introduced to the supply side of a diaphragm unit (3), where the organic gas in the diluted mixed gas is recovered on the permeation side, and the remaining gas is discharged to outside this equipment. |
