| 摘要 |
<p>PURPOSE: A support body for a contact terminal and a probe card are provided to increase conductance by inserting a thermal conductor into a contact terminal hole. CONSTITUTION: A main body(15) includes a laminated plate member. A contact terminal hole(16) passes through the laminated plate member. The contact terminal hole is formed in the laminated plate member. A coolant flow path(17) is formed in the main body. A contact terminal is inserted into the contact terminal hole.</p> |
