发明名称 |
LASER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD FOR GENERATING LASER BEAM |
摘要 |
A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam, at least one power source for varying an excitation intensity in the at least one amplifier, and a controller configured to control the pulse energy adjusting unit on a pulse-to-pulse basis for the pulse laser beam passing therethrough and to control the at least one power source for a group of multiple pulses of the pulse laser beam.
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申请公布号 |
US2013099140(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US201213805300 |
申请日期 |
2012.03.05 |
申请人 |
NAKARAI HIROAKI;WAKABAYASHI OSAMU;HOSHINO HIDEO;GIGAPHOTON INC. |
发明人 |
NAKARAI HIROAKI;WAKABAYASHI OSAMU;HOSHINO HIDEO |
分类号 |
H01S3/00 |
主分类号 |
H01S3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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