METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE

摘要

The present invention relates to a method and an apparatus for manufacturing an organic EL device with which quality degradation may be prevented. According to the method of the present invention, a belt-shaped base material is moved in a longitudinal direction while being vapor deposited to form a composition layer of the organic EL device on the base material. The method of the present invention comprises a composition layer formation process in which a sequential deposition is performed, while the base material is moved in the longitudinal direction, by discharging a vaporization material from a deposition source to a surface of the base material at first and second vapor deposition units disposed along the direction in which the base material is moved. The composition layer formation process comprises a plurality of upward deposition and direction conversion processes.