发明名称 METHOD FOR MANUFACTURING MICROSTRUCTURE, AND MICROSTRUCTURED DIE
摘要 The present invention is a method of manufacturing a fine structure body which manufactures the fine structure body by repeating a basic fine structure body forming step that forms a basic fine structure body by pressing a fine structure mold against a curable resin (photocurable resin film) on a surface of a base material and a release and moving step that releases the fine structure mold from the base material and moves the fine structure mold, wherein the fine structure mold includes at least a first mold depression pattern which is disposed at center area of it, and a second mold depression pattern which is disposed in at least one side part in circumference area of it, and a size of the second mold depression pattern is smaller than a size of the first mold depression pattern.
申请公布号 KR20130042019(A) 申请公布日期 2013.04.25
申请号 KR20137006496 申请日期 2012.04.26
申请人 PANASONIC CORPORATION 发明人 YAMAMOTO YUJI;WADA TOSHI HIKO;TAKASU YOSHIFUMI;YAMADA AKIHISA
分类号 H01L21/027;B81C99/00 主分类号 H01L21/027
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