发明名称 |
CAPACITIVE SENSOR AND METHOD FOR MAKING THE SAME |
摘要 |
The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.
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申请公布号 |
US2013098151(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US200913063342 |
申请日期 |
2009.09.03 |
申请人 |
SULAIMAN SURAYA;TAMSIR AGUS SANTOSO;MANUT AZRIF;ALIAS DZUZLINDAH MUHAMAD;ZAIN AZLINA MOHD |
发明人 |
SULAIMAN SURAYA;TAMSIR AGUS SANTOSO;MANUT AZRIF;ALIAS DZUZLINDAH MUHAMAD;ZAIN AZLINA MOHD |
分类号 |
G01N27/22 |
主分类号 |
G01N27/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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