发明名称 |
PREPARATION OF SEMICONDUCTOR FILMS |
摘要 |
The invention relates to a preparation process for thin semiconducting inorganic films comprising various metals (Cu/In/Zn/Ga/Sn), selenium and/or sulfur. The process uses molecular precursors comprising metal complexes with oximato ligands. Copper-based chalcopyrites of the I-III-IV2-type are prepared with high purity at low temperatures under ambient conditions. The thin films can be used in photovoltaic panels (solar cells).
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申请公布号 |
US2013102108(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US201113807382 |
申请日期 |
2011.05.31 |
申请人 |
DESHMUKH RANJAN DEEPAK;KUEGLER RALF;SCHNEIDER JOERG J.;HOFFMANN RUDOLF;MERCK PATENT GESELLSCHAFT MIT BESCHRANKTER HAFTUNG |
发明人 |
DESHMUKH RANJAN DEEPAK;KUEGLER RALF;SCHNEIDER JOERG J.;HOFFMANN RUDOLF |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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