| 摘要 |
<p>A cheaper illumination device for inspections, which uses a Koehler illumination system, is provided. The illumination device for inspections (10) is provided with: a light source part (20); a collimator lens (30) that converts light emitted by the light source (20) into parallel light; Fresnel condenser lenses (40) for focusing light that has passed through the collimator lens (30) toward a test object (W); and a sigma diaphragm (50) positioned between the collimator lens (30) and the Fresnel condenser lenses (40). An apodizing filter (70) is installed between the sigma diaphragm (50) and the Fresnel condenser lenses (40).</p> |
