PURPOSE: A method for manufacturing a solar cell is provided to form a transparent electrode and an intrinsic layer with different electric properties by a sputtering process using one target. CONSTITUTION: A bottom electrode is formed on a substrate. A light absorbing layer(30) is formed on the bottom electrode. A buffer layer(40) is formed on the light absorbing layer. A window layer(70) including an intrinsic layer and a transparent electrode with different electric properties is formed on the buffer layer. The intrinsic layer and the transparent electrode are formed by a sputtering process using one target made of metal oxide doped with metal impurities.
申请公布号
KR20130041631(A)
申请公布日期
2013.04.25
申请号
KR20110106020
申请日期
2011.10.17
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
KIM, KYUNG HYUN;KIM, JE HA;CHOI, HAE WON;CHO, DAE HYUNG;CHUNG, YONG DUCK