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发明名称
Procédé de pompage à vide et pompes à vide
摘要
申请公布号
FR1428838(A)
申请公布日期
1966.02.18
申请号
FR19650010126
申请日期
1965.03.22
申请人
VARIAN ASSOCIATES
发明人
分类号
H01J41/16
主分类号
H01J41/16
代理机构
代理人
主权项
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